Tunability of Piezoelectric MEMS Ring Resonator Based Filter

The influence of piezoelectric actuator design on a two-port piezoelectrically transduced micro-electro-mechanical (MEMS) ring resonator frequency tuning performance has been investigated. A cubic silicon carbide (3C-SiC) ring resonator was fabricated with a lead–zirconium–titanate (PZT) piezoelectric actuator and sensor integrated on the surface of the ring. Measurements of the transmission frequency response have shown that the device with the ring diameter of 260 μm resonates at 1.082 MHz and a frequency tuning range of about 3,200 ppm has been achieved by applying DC bias voltage in the range 0 V – 6 V. Experimental results have shown that, under the same operating conditions, a wider frequency tuning range has been detected when the device was actuated and tuned with the piezoelectric actuator that covers a larger area of the ring surface and surrounds the central hole of the ring resonant structure. © 2016 The Authors. Published by Elsevier Ltd. Peer-review under responsibility of the organizing committee of the 30th Eurosensors Conference.